Investigation of the superconducting properties of NbN films deposited by DC magnetron sputtering on a high-k dielectric HfO<sub>2</sub> buffer layer
نویسندگان
چکیده
The influence of the buffer layer hafnia dielectric on superconducting properties niobium nitride films, produced by technique reactive magnetron depositing has been investigated for first time. This study presents a comprehensive analysis morphological, microstructural, and electrophysical parameters thin NbN films.
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ژورنال
عنوان ژورنال: Superconductor Science and Technology
سال: 2021
ISSN: ['1361-6668', '0953-2048']
DOI: https://doi.org/10.1088/1361-6668/ac216a